| X/Y Travel (mm) | 300 × 400 | 400 × 500 | 500 × 600 | 600 × 800 |
| Z Travel (mm) | 200 |
| Linear Scale (X/Y/Z) | Glass grating scale, 0.5 μm resolution |
| Guideway System | Precision linear guides, dual-rail with double sliders |
| Operating Mode | Joystick + mouse control, automatic measurement programs |
| Accuracy E1x,y* (μm) | 2 + L/200 |
| Accuracy E1z* (μm) | 4.0 + L/200 |
| Repeatability (μm) | 2 |
| Contour Lighting | LED parallel contour illumination |
| Surface Lighting | 0–255 stepless adjustable, 5-ring / 8-zone LED surface illumination |
| Camera | 1/2.9" high-definition digital color camera |
| Optics / Magnification** | 8.3× electronic feedback zoom lens; optical 0.6×–5.0×; video 20×–170× (21.5" monitor) |
| Measuring Software | iMeasuring |
| Supported OS | Windows 10/11 (32/64-bit) |
| Language Options | English, Simplified Chinese, Traditional Chinese (additional languages available) |
| Operating Conditions | 20°C ±2°C; <1°C/hr change; 30–80% RH; vibration <0.02 g, ≤15 Hz |
| Power | 220 V / 50 Hz / 10 A (110V is also available) |
| Machine Dimensions (W × D × H, mm) | 1195 × 832 × 1579 | 1463 × 940 × 1591 | 1568 × 1040 × 1591 | 1818 × 1157 × 1590 |
| Crate Dimensions (W × D × H, mm) | 1380 × 1170 × 1910 | 1690 × 1300 × 2000 | 1800 × 1400 × 2000 | 2300 × 1700 × 2000 |
| Net Weight (kg) | 650 | 780 | 1380 | 2000 |