| Marble Worktable (mm) | 270 × 350 | 408 × 308 | 458 × 358 | 608 × 470 | 650 × 580 |
| Glass Stage (mm) | 142 × 242 | 306 × 198 | 356 × 248 | 456 × 348 | 540 × 440 |
| X/Y Travel (mm) | 200 × 100 | 250 × 150 | 300 × 200 | 400 × 300 | 500 × 400 |
| Product Type | High Precision Semi-Automatic Vision Measuring Machine (M6-iSemi Series) |
| Z Travel | High-precision linear guide; effective travel 200 mm (all models) |
| Resolution (X/Y/Z) | 0.5 μm (all models) |
| Base and Uprights | High-precision granite (all models) |
| Measurement Accuracy* | E1x,y: 2.5 + L/200 (μm); E1z: 4 + L/200 (μm) (all models) |
| Repeatability (μm) | 2 (all models) |
| Surface Lighting (software controlled) | 4-ring / 8-zone continuously adjustable LED cold surface illumination |
| Contour Lighting | LED parallel contour illumination |
| Optional Lighting | Coaxial light (optional) |
| Camera | 1/2.9" high-resolution digital camera, 1.6 Mpixel (all models) |
| Zoom Lens | 6.5× electronic feedback zoom lens; optical 0.7×–4.5×; video 20×–129× |
| Measuring Software | iMeasuring |
| Supported OS | Windows 10/11 (32/64-bit) |
| Language Options | English, Simplified Chinese, Traditional Chinese (other languages optional) |
| Operating Conditions | 20°C ±2°C; temperature change <1°C/hr; 30–80% RH; vibration <0.02 g, ≤15 Hz |
| Power | AC 220V / 50Hz; or 110V / 60Hz |
| Machine Dimensions (W × D × H, mm) | 677 × 552 × 998 | 790 × 617 × 1000 | 838 × 667 × 1000 | 1002 × 817 × 1043 | 1111 × 867 × 1086 |
| Crate Dimensions (W × D × H, mm) | 1030 × 780 × 1260 | 1030 × 780 × 1260 | 1030 × 780 × 1260 | 1130 × 1000 × 1270 | 1250 × 1035 × 1460 |
| Weight (Gross / Net, kg) | 220 / 150 | 242 / 175 | 275 / 185 | 449 / 350 | 550 / 380 |